The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 29, 2014
Filed:
Jan. 05, 2010
Paul Lefevre, Topsfield, MA (US);
Anoop Mathew, Peabody, MA (US);
Guangwei Wu, Sunnyvale, CA (US);
Oscar K. Hsu, Chelmsford, MA (US);
David Adam Wells, Hudson, NH (US);
John Erik Aldeborgh, Boxford, MA (US);
Marc C. Jin, Boston, MA (US);
Xuechan Zhao, Lexington, MA (US);
Paul Lefevre, Topsfield, MA (US);
Anoop Mathew, Peabody, MA (US);
Guangwei Wu, Sunnyvale, CA (US);
Scott Xin Qiao, Macungie, PA (US);
Oscar K. Hsu, Chelmsford, MA (US);
David Adam Wells, Hudson, NH (US);
John Erik Aldeborgh, Boxford, MA (US);
Marc C. Jin, Boston, MA (US);
FNS Tech Co., Ltd., Cheonan-Si, KR;
Abstract
The present disclosure relates to a chemical mechanical planarization pad and a method of making and using a chemical mechanical planarization pad. The chemical mechanical planarization pad may include a first component including a water soluble composition and water insoluble composition exhibiting a solubility in water of less than that of the water soluble composition, wherein at least one of the water soluble and water insoluble compositions of the first component is formed of fibers. The chemical mechanical planarization pad may also include a second component, wherein the first component is present as a discrete phase in a continuous of the second component.