The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 29, 2014
Filed:
Nov. 20, 2012
Component Re-engineering Company, Inc., Santa Clara, CA (US);
Alfred Grant Elliot, Palo Alto, CA (US);
Brent Donald Alfred Elliot, Cupertino, CA (US);
Frank Balma, Los Gatos, CA (US);
Richard Erich Schuster, Milpitas, CA (US);
Dennis George Rex, Williams, OR (US);
Alexander Veytser, Mountain View, CA (US);
Component Re-Engineering Company, Inc., Santa Clara, CA (US);
Abstract
A method for the joining of ceramic pieces with a hermetically sealed joint comprising brazing a continuous layer of joining material between the two pieces. The wetting and flow of the joining material is controlled by the selection of the joining material, the joining temperature, the time at temperature, the joining atmosphere, and other factors. The ceramic pieces may be aluminum nitride and the pieces may be brazed with an aluminum alloy under controlled atmosphere. The joint material is adapted to later withstand both the environments within a process chamber during substrate processing, and the oxygenated atmosphere which may be seen within the shaft of a heater or electrostatic chuck.