The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 22, 2014

Filed:

Jun. 27, 2011
Applicants:

Chung-yeh Lee, Hsinchu, TW;

Pei-hsun Wu, Hsinchu, TW;

Shiang-wen Huang, Hsinchu, TW;

Inventors:

Chung-Yeh Lee, Hsinchu, TW;

Pei-Hsun Wu, Hsinchu, TW;

Shiang-Wen Huang, Hsinchu, TW;

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 29/78 (2006.01);
U.S. Cl.
CPC ...
H01L 29/7817 (2013.01); H01L 29/7826 (2013.01);
Abstract

A reduced surface field (RESURF) structure and a lateral diffused metal oxide semiconductor (LDMOS) device including the same are provided. The RESURF structure includes a substrate of a first conductivity type, a deep well region of a second conductivity type, an isolation structure, at least one trench insulating structure, and at least one doped region of the first conductivity type. The deep well region is disposed in the substrate. The isolation structure is disposed on the substrate. The trench insulating structure is disposed in the deep well region below the isolation structure. The doped region is disposed in the deep well region and surrounds a sidewall and a bottom of the trench insulating structure.


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