The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 22, 2014
Filed:
Oct. 12, 2010
Yuya Inoue, Chigasaki, JP;
Tamotsu Tanifuji, Chigasaki, JP;
Hisato Tanaka, Chigasaki, JP;
Makoto Takahashi, Hidaka, JP;
Kuniyoshi Sekine, Hidaka, JP;
Yuya Inoue, Chigasaki, JP;
Tamotsu Tanifuji, Chigasaki, JP;
Hisato Tanaka, Chigasaki, JP;
Makoto Takahashi, Hidaka, JP;
Kuniyoshi Sekine, Hidaka, JP;
Ulvac, Inc., Chigasaki-shi, JP;
Abstract
Provided is a substrate stage which can transfer a substrate at a high speed. In the substrate stage of the present invention, auxiliary mounting tables are attached to a main mounting table, and lower rails are arranged over on the main mounting table and above the auxiliary mounting tables. When both ends of the lower rails are bent upwardly by a vertically adjusting unit in order to prevent the both ends of the lower rails to be bent downwardly, the lower rails are made straight. Since the lower rail is not divided, the linearity is ensured and the moving plate does not stutter so that transfer of the substrate at high speed can be performed.