The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 15, 2014
Filed:
Sep. 08, 2006
Tohru Kiuchi, Higashi-kurume, JP;
Takeyuki Mizutani, Kumagaya, JP;
Masahiro Nei, Yokohama, JP;
Masato Hamatani, Kounosu, JP;
Masahiko Okumura, Tokyo, JP;
Tohru Kiuchi, Higashi-kurume, JP;
Takeyuki Mizutani, Kumagaya, JP;
Masahiro Nei, Yokohama, JP;
Masato Hamatani, Kounosu, JP;
Masahiko Okumura, Tokyo, JP;
Nikon Corporation, Tokyo, JP;
Abstract
An exposure apparatus comprises a liquid immersion system, a first mover, and a prescribed member. The exposure apparatus exposes a substrate via an optical member and a liquid. The liquid immersion system performs supply and recovery of the liquid. The first mover can move in a first area, and can hold the liquid between itself and the optical member. The prescribed member is removed from the first mover when the first mover withdraws from a position opposing the optical member, and can hold the liquid between itself and the optical member.