The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 15, 2014
Filed:
Jun. 12, 2009
Ken-ichi Tada, Kanagawa, JP;
Toshiki Yamamoto, Kanagawa, JP;
Hirokazu Chiba, Kanagawa, JP;
Kohei Iwanaga, Kanagawa, JP;
Atsushi Maniwa, Kanagawa, JP;
Tadahiro Yotsuya, Kanagawa, JP;
Noriaki Oshima, Kanagawa, JP;
Ken-ichi Tada, Kanagawa, JP;
Toshiki Yamamoto, Kanagawa, JP;
Hirokazu Chiba, Kanagawa, JP;
Kohei Iwanaga, Kanagawa, JP;
Atsushi Maniwa, Kanagawa, JP;
Tadahiro Yotsuya, Kanagawa, JP;
Noriaki Oshima, Kanagawa, JP;
Tosoh Corporation, Yamaguchi, JP;
Sagami Chemical Research Institute, Kanagawa, JP;
Abstract
A subject for the invention is to provide novel titanium complexes which have a high vapor pressure and high thermal stability and serve as an excellent material for producing a titanium-containing thin film by a technique such as the CVD method or ALD method and to further provide processes for producing these complexes, titanium-containing thin films produced from the complexes, and a process for producing the thin films. The invention relates to producing a titanium complex represented by general formula (1): (wherein Rand Reach independently represent an alkyl group having 1-16 carbon atoms; Rand Reach independently represent a hydrogen atom or an alkyl group having 1-3 carbon atoms; and Rrepresents an alkyl group which has 1-16 carbon atoms and may have been substituted with one or more fluorine atoms) and to producing a titanium-containing thin film using the complex.