The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 15, 2014
Filed:
Sep. 13, 2011
Jun Yamawaku, Nirasaki, JP;
Chishio Koshimizu, Nirasaki, JP;
Tatsuo Matsudo, Nirasaki, JP;
Kenji Nagai, Nirasaki, JP;
Jun Yamawaku, Nirasaki, JP;
Chishio Koshimizu, Nirasaki, JP;
Tatsuo Matsudo, Nirasaki, JP;
Kenji Nagai, Nirasaki, JP;
Tokyo Electron Limited, , JP;
Abstract
The temperature measuring apparatus includes: a light source; a first wavelength-dividing unit which wavelength-divides a light from the light source into m lights whose wavelength bands are different from one another; m first dividing units which divides each of the m lights from the first wavelength-dividing unit into n lights; a transmitting unit which transmits lights from the m first dividing unit to measurement points of an object to be measured; a light receiving unit which receives a light reflected by each of the measurement points; and a temperature calculating unit which calculates a temperature of each of the measurement points based on a waveform of the light received by the light receiving unit.