The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 08, 2014
Filed:
Feb. 22, 2005
Hans Van Der Laan, Veldhoven, NL;
Rene Hubert Jacobus Carpaij, Vught, NL;
Hugo Augustinus Joseph Cramer, Eindhoven, NL;
Antoine Gaston Marie Kiers, Veldhoven, NL;
Hans Van Der Laan, Veldhoven, NL;
Rene Hubert Jacobus Carpaij, Vught, NL;
Hugo Augustinus Joseph Cramer, Eindhoven, NL;
Antoine Gaston Marie Kiers, Veldhoven, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
A method according to an embodiment includes obtaining calibration measurement data, with an optical detection apparatus, from a plurality of marker structure sets provided on a calibration substrate. Each marker structure set includes at least one calibration marker structure created using different known values of the process parameter. The method includes obtaining measurement data, with the optical detection apparatus, from at least one marker structure provided on a substrate and exposed using an unknown value of the process parameter; and determining the unknown value of the process parameter from the obtained measurement data by employing regression coefficients in a model based on the known values of the process parameter and the calibration measurement data.