The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 01, 2014
Filed:
Jun. 30, 2006
Torsten Jähnke, Lychen, DE;
Torsten Jähnke, Lychen, DE;
JPK Instruments AG, Berlin, DE;
Abstract
The invention relates to a method for examining a measurement object (), in which the measurement object () is examined by means of scanning probe microscopy using a measurement probe () of a scanning probe measurement device, and in which at least one subsection () of the measurement object () is optically examined by an optical measurement system in an observation region associated with the optical measurement system, wherein a displacement of the at least one subsection () of the measurement object () out of the observation region which is brought about by the examination by means of scanning probe microscopy is corrected in such a way that the at least one displaced subsection () of the measurement object () is arranged back in the observation region by means of a readjustment device which processes data signals that characterize the displacement.