The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 01, 2014

Filed:

Jan. 06, 2012
Applicants:

Lei Yuan, Sunnyvale, CA (US);

Jin Cho, Palo Alto, CA (US);

Jongwook Kye, Pleasanton, CA (US);

Inventors:

Lei Yuan, Sunnyvale, CA (US);

Jin Cho, Palo Alto, CA (US);

Jongwook Kye, Pleasanton, CA (US);

Assignee:

GlobalFoundries, Inc., Grand Cayman, KY;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/4763 (2006.01); H01L 21/768 (2006.01);
U.S. Cl.
CPC ...
Abstract

Fabrication methods for semiconductor device structures are provided. One method for fabricating a semiconductor device structure involves forming a first layer of a first dielectric material overlying a doped region formed in a semiconductor substrate, forming a first conductive contact electrically connected to the doped region within the first layer, forming a dielectric cap on the first conductive contact, forming a second layer of a second dielectric material overlying the dielectric cap and a gate structure overlying the semiconductor substrate, and forming a second conductive contact electrically connected to the gate structure within the second layer.


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