The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 01, 2014
Filed:
Apr. 27, 2012
Applicants:
Takakazu Kimoto, Tokyo, JP;
Mitsuo Sato, Tokyo, JP;
Yusuke Asano, Tokyo, JP;
Tomohiro Kakizawa, Tokyo, JP;
Inventors:
Takakazu Kimoto, Tokyo, JP;
Mitsuo Sato, Tokyo, JP;
Yusuke Asano, Tokyo, JP;
Tomohiro Kakizawa, Tokyo, JP;
Assignee:
JSR Corporation, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/039 (2006.01); G03F 7/30 (2006.01); C08F 12/20 (2006.01);
U.S. Cl.
CPC ...
Abstract
A radiation sensitive resin composition includes a first polymer having a group represented by a following formula (1), and a radiation sensitive acid generator. n is an integer of 2 to 4. X represents a single bond or a bivalent organic group. A represents a (n+1) valent linking group. Each Q independently represents a group that includes an alkali-dissociable group.