The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 24, 2014
Filed:
Jun. 14, 2012
Applicants:
Joerg Fober, Heuchlingen, DE;
Martin Hugelmann, Koenigsbronn, DE;
Inventors:
Joerg Fober, Heuchlingen, DE;
Martin Hugelmann, Koenigsbronn, DE;
Assignee:
Carl Zeiss Microscopy GmbH, Jena, DE;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01R 19/00 (2006.01); G01R 31/26 (2014.01); G01R 31/305 (2006.01);
U.S. Cl.
CPC ...
Abstract
A high-voltage supply unit is provided for a particle beam device. The high-voltage supply unit includes at least one high-voltage cable for feeding a high voltage, and at least one measuring device for measuring the high voltage. The measuring device has at least one first capacitor, and the first capacitor is formed by at least one first section of the high-voltage cable.