The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 24, 2014
Filed:
Nov. 23, 2011
Stephanus Hubertus Leonardus Van Den Boom, Geldrop, NL;
Pleun Dona, Veldhoven, NL;
Laurens Franz Taemsz Kwakman, Saint Ismier, FR;
Uwe Luecken, Eindhoven, NL;
Hervé-william Rémigy, Eindhoven, NL;
Hendrik Nicolaas Slingerland, Venlo, NL;
Martin Verheijen, Geldrop, NL;
Gerbert Jeroen Van DE Water, Breugel, NL;
Stephanus Hubertus Leonardus van den Boom, Geldrop, NL;
Pleun Dona, Veldhoven, NL;
Laurens Franz Taemsz Kwakman, Saint Ismier, FR;
Uwe Luecken, Eindhoven, NL;
Hervé-William Rémigy, Eindhoven, NL;
Hendrik Nicolaas Slingerland, Venlo, NL;
Martin Verheijen, Geldrop, NL;
Gerbert Jeroen van de Water, Breugel, NL;
FEI Company, Hillsboro, OR (US);
Abstract
A method of determining the temperature of a sample carrier in a charged particle-optical apparatus, characterized in that the method comprises the observation of the sample carrier with a beam of charged particles, the observation giving information about the temperature of the sample carrier. The invention is based on the insight that a charged particle optical apparatus, such as a TEM, STEM, SEM or FIB, can be used to observe temperature related changes of a sample carrier. The changes may be mechanical changes (e.g. of a bimetal), crystallographic changes (e.g. of a perovskite), and luminescent changes (in intensity or decay time). In a preferred embodiment the sample carrier shows two bimetals, showing metals with different thermal expansion coefficients, bending in opposite directions. The distance between the two bimetals is used as a thermometer.