The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 17, 2014
Filed:
Apr. 27, 2011
Jimin Zhang, San Jose, CA (US);
Harry Q. Lee, Los Altos, CA (US);
Zhihong Wang, Santa Clara, CA (US);
Jeffrey Drue David, San Jose, CA (US);
Boguslaw A. Swedek, Cupertino, CA (US);
Dominic J. Benvegnu, La Honda, CA (US);
Jimin Zhang, San Jose, CA (US);
Harry Q. Lee, Los Altos, CA (US);
Zhihong Wang, Santa Clara, CA (US);
Jeffrey Drue David, San Jose, CA (US);
Boguslaw A. Swedek, Cupertino, CA (US);
Dominic J. Benvegnu, La Honda, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
A computer-implemented method of generating reference spectra includes polishing a plurality of set-up substrates, the plurality of set-up substrates comprising at least three set-up substrates, measuring a sequence of spectra from each of the plurality of set-up substrates during polishing with an in-situ optical monitoring system to provide a plurality of sequences of spectra, generating a plurality of sequences of potential reference spectra from the plurality of sequences of spectra, determining which sequence of potential reference spectra of the plurality of sequences provides a best match to remaining sequences of the plurality of sequences, and storing the sequence of potential reference spectra determined to provide the best match as reference spectra, and selecting and storing the sequence of potential reference spectra.