The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 17, 2014
Filed:
Dec. 07, 2012
Kabushiki Kaisha Toshiba, Tokyo, JP;
Yukiteru Matsui, Yokohama, JP;
Gaku Minamihaba, Yokohama, JP;
Hajime Eda, Kawasaki, JP;
Masayoshi Iwayama, Yokohama, JP;
Minoru Amano, Sagamihara, JP;
Masatoshi Yoshikawa, Yokohama, JP;
Motoyuki Sato, Yokohama, JP;
Kyoichi Suguro, Yokohama, JP;
Masako Kodera, Yokohama, JP;
Kabushiki Kaisha Toshiba, Tokyo, JP;
Abstract
According to one embodiment, a semiconductor device includes a switch element provided in a surface area of a semiconductor substrate, a contact plug with an upper surface and a lower surface, and a function element provided on the upper surface of the contact plug. The lower surface of the contact plug is connected to the switch element. The upper surface of the contact plug has a maximum roughness of 0.2 nm or less.