The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 03, 2014
Filed:
Mar. 02, 2011
Applicant:
Torbjörn Sandström, Pixbo, SE;
Inventor:
Torbjörn Sandström, Pixbo, SE;
Assignee:
Micronic Laser Systems AB, Taby, SE;
Primary Examiner:
Int. Cl.
CPC ...
G02B 26/00 (2006.01); G02B 26/08 (2006.01); G02B 27/10 (2006.01); G03F 7/20 (2006.01); B41J 2/447 (2006.01); B41J 2/455 (2006.01); B23K 26/00 (2014.01); H01L 21/302 (2006.01); B23K 26/08 (2014.01);
U.S. Cl.
CPC ...
H01L 21/302 (2013.01); B23K 26/08 (2013.01); B23K 26/0066 (2013.01);
Abstract
The present invention relates to laser ablation microlithography. In particular, we disclose a new SLM design and patterning method that uses multiple mirrors per pixel to concentrate energy to an energy density that facilitates laser ablation, while keeping the energy density on the SLM mirror surface at a level that does not damage the mirrors. Multiple micro-mirrors can be reset at a very high frequency, far beyond current DMD devices.