The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 03, 2014
Filed:
Jun. 07, 2012
Applicants:
Mostafa Maazouz, Hillsboro, OR (US);
Jonathan H. Orloff, Rockaway Beach, OR (US);
Inventors:
Mostafa Maazouz, Hillsboro, OR (US);
Jonathan H. Orloff, Rockaway Beach, OR (US);
Assignee:
FEI Company, Hillsboro, OR (US);
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01J 37/12 (2006.01); H01J 37/153 (2006.01); H01J 37/21 (2006.01); H01J 37/04 (2006.01);
U.S. Cl.
CPC ...
H01J 37/153 (2013.01); H01J 37/21 (2013.01); H01J 37/12 (2013.01); H01J 37/04 (2013.01);
Abstract
A charged particle column having improved performance at multiple beam energies. The column employs a four-element objective lens to enable improved beam focusing performance at both high and low beam energies at a target, with differing focus voltage configurations for different beam energies. By changing the voltages applied to the four electrodes of the objective lens, different focusing conditions may be rapidly configured, enabling rapid toggling between optimized imaging and optimized processing of a target.