The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 03, 2014
Filed:
Apr. 22, 2008
Applicants:
Sven Lindfors, Espoo, FI;
Pekka J. Soininen, Espoo, FI;
Inventors:
Sven Lindfors, Espoo, FI;
Pekka J. Soininen, Espoo, FI;
Assignee:
Picosun Oy, Espoo, FI;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 16/455 (2006.01); C23C 16/52 (2006.01); H01L 21/306 (2006.01); C23F 1/00 (2006.01); C23C 16/06 (2006.01); C23C 16/22 (2006.01);
U.S. Cl.
CPC ...
Abstract
An apparatus, such as an ALD (Atomic Layer Deposition) apparatus, including a precursor source configured for depositing material on a heated substrate in a deposition reactor by sequential self-saturating surface reactions. The apparatus includes an in-feed line for feeding precursor vapor from the precursor source to a reaction chamber and a structure configured for utilizing heat from a reaction chamber heater for preventing condensation of precursor vapor into liquid or solid phase between the precursor source and the reaction chamber. Also various other apparatus and methods are presented.
Published as:
US2009263578A1; WO2009130375A1; EP2274457A1; KR20110008089A; CN102016118A; JP2011518256A; RU2010146303A; KR20130043244A; KR20130055703A; US2013183444A1; CN102016118B; CN103215571A; EP2628820A1; EP2628821A1; CN103266309A; US2013240056A1; JP2013189713A; JP2013211551A; RU2503744C2; US8741062B2; US8753716B2; RU2013116787A; JP5606571B2; RU2013120817A; JP5635974B2; EP2274457A4; JP5756143B2; KR101561430B1; CN103215571B; RU2630731C2; RU2630727C2; EP2274457B1; EP2628820B1; EP2628821B1; EP3339470A1; KR101876465B1; KR20180080340A; KR101978398B1; CN103266309B; EP3339470B1;