The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 27, 2014
Filed:
Jan. 27, 2011
Applicants:
Takeshi Inasaki, Shizuoka, JP;
Takayuki Ito, Shizuoka, JP;
Tomotaka Tsuchimura, Shizuoka, JP;
Tadateru Yatsuo, Shizuoka, JP;
Koutarou Takahashi, Shizuoka, JP;
Inventors:
Takeshi Inasaki, Shizuoka, JP;
Takayuki Ito, Shizuoka, JP;
Tomotaka Tsuchimura, Shizuoka, JP;
Tadateru Yatsuo, Shizuoka, JP;
Koutarou Takahashi, Shizuoka, JP;
Assignee:
FUJIFILM Corporation, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/039 (2006.01); G03F 7/038 (2006.01); G03F 7/20 (2006.01); G03F 7/30 (2006.01);
U.S. Cl.
CPC ...
Abstract
An actinic ray-sensitive or radiation-sensitive resin composition comprising (P) a resin having a repeating unit represented by the following formula (1), a resist film using the composition, and a pattern forming method.