The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 27, 2014

Filed:

Jan. 27, 2011
Applicants:

Takeshi Inasaki, Shizuoka, JP;

Takayuki Ito, Shizuoka, JP;

Tomotaka Tsuchimura, Shizuoka, JP;

Tadateru Yatsuo, Shizuoka, JP;

Koutarou Takahashi, Shizuoka, JP;

Inventors:

Takeshi Inasaki, Shizuoka, JP;

Takayuki Ito, Shizuoka, JP;

Tomotaka Tsuchimura, Shizuoka, JP;

Tadateru Yatsuo, Shizuoka, JP;

Koutarou Takahashi, Shizuoka, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/039 (2006.01); G03F 7/038 (2006.01); G03F 7/20 (2006.01); G03F 7/30 (2006.01);
U.S. Cl.
CPC ...
Abstract

An actinic ray-sensitive or radiation-sensitive resin composition comprising (P) a resin having a repeating unit represented by the following formula (1), a resist film using the composition, and a pattern forming method.


Find Patent Forward Citations

Inasaki, Takeshi. (2014). Actinic ray-sensitive or radiation-sensitive resin composition, resist film using the composition and pattern forming method (U.S. Patent No. 8735048). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/8735048

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