The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 20, 2014

Filed:

Sep. 08, 2010
Applicant:

Martijn Constant Van Beurden, Eindhoven, NL;

Inventor:
Assignee:

ASML Netherlands B.V., Veldhoven, NL;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G06G 7/56 (2006.01); G06F 17/10 (2006.01); G01B 11/02 (2006.01); G01B 11/30 (2006.01); G06F 17/50 (2006.01); G01R 15/00 (2006.01);
U.S. Cl.
CPC ...
Abstract

Improved convergence in the volume-integral method (VIM) of calculating electromagnetic scattering properties of a structure is achieved by numerically solving a volume integral equation for a vector field, F, rather than the electric field, E. The electric field, E, is determined from the vector field, F, after solving of the volume integral equation. The vector field, F, may be related to the electric field, E, by a change of basis, and may be continuous at material boundaries where the electric field, E, has discontinuities. Convolutions of the vector field, F, are performed using convolution operators according to the finite Laurent rule, which allows for efficient matrix-vector products using Fast Fourier Transforms. An invertible convolution-and-change-of-basis operator, C, is configured to transform the vector field, F, to the electric field, E, by performing a change of basis according to material and geometric properties of the periodic structure.


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