The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 20, 2014
Filed:
Nov. 07, 2007
Applicant:
Takashi Kaito, Chiba, JP;
Inventor:
Takashi Kaito, Chiba, JP;
Assignee:
SII Nano Technology Inc., Chiba, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 14/00 (2006.01); C23C 14/32 (2006.01); B44C 1/22 (2006.01); C03C 15/00 (2006.01); C03C 25/68 (2006.01); C23F 1/00 (2006.01); C23F 3/00 (2006.01); C23C 14/04 (2006.01); C23C 14/14 (2006.01); G01Q 60/38 (2010.01); G01Q 70/10 (2010.01); G01Q 70/12 (2010.01); B82Y 35/00 (2011.01); G01N 1/32 (2006.01);
U.S. Cl.
CPC ...
G01Q 60/38 (2013.01); G01Q 70/10 (2013.01); G01Q 70/12 (2013.01); B82Y 35/00 (2013.01); G01N 1/32 (2013.01); H01J 2237/20 (2013.01); H01J 2237/3109 (2013.01); H01J 2237/31732 (2013.01); H01J 2237/3174 (2013.01);
Abstract
A method of manufacturing a sample for an atom probe analysis of the invention is made one going through a step of manufacturing a concave/convex structure in both of a base needle and a transplantation sample piece by an etching working of an FIB, a step of jointing mutual members, and a step of bonding such that the concave/convex structure becomes a mesh form by a deposition working of the FIB.