The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 13, 2014
Filed:
Apr. 08, 2009
Marcus Adrianus Van DE Kerkhof, Helmond, NL;
Antoine Gaston Marie Kiers, Veldhoven, NL;
Maurits Van Der Schaar, Eindhoven, NL;
Leonardus Henricus Marie Verstappen, Weert, NL;
Scott Anderson Middlebrooks, Duizel, NL;
Andreas Fuchs, Meerbusch, DE;
Marcus Adrianus Van De Kerkhof, Helmond, NL;
Antoine Gaston Marie Kiers, Veldhoven, NL;
Maurits Van Der Schaar, Eindhoven, NL;
Leonardus Henricus Marie Verstappen, Weert, NL;
Scott Anderson Middlebrooks, Duizel, NL;
Andreas Fuchs, Meerbusch, DE;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
A scatterometer configured to measure a property of a substrate, includes a radiation source configured to provide a radiation beam; and a detector configured to detect a spectrum of the radiation beam reflected from a target () on the surface of the substrate (W) and to produce a measurement signal representative of the spectrum. The apparatus includes a beam shaper () interposed in the radiation path between the radiation source and the detector, the beam shaper being configured to adjust the cross section of the beam dependent on the shape and/or size of the target.