The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 13, 2014
Filed:
Mar. 08, 2011
Applicants:
Jong-cheol Lee, Seoul, KR;
Ki-yeon Park, Hwaseong-si, KR;
Chun-hyung Chung, Seoul, KR;
Cha-young Yoo, Suwon-si, KR;
Inventors:
Jong-cheol Lee, Seoul, KR;
Ki-yeon Park, Hwaseong-si, KR;
Chun-hyung Chung, Seoul, KR;
Cha-young Yoo, Suwon-si, KR;
Assignee:
Samsung Electronics Co., Ltd., Suwon-si, KR;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/768 (2006.01); H01L 49/02 (2006.01);
U.S. Cl.
CPC ...
H01L 21/76835 (2013.01); H01L 21/76831 (2013.01); H01L 28/55 (2013.01);
Abstract
An electronic device includes a lower layer, a complex dielectric layer on the lower layer, and an upper layer on the complex dielectric layer. The complex dielectric layer includes an amorphous metal silicate layer and a crystalline metal-based insulating layer thereon. Related fabrication methods are also discussed.