The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 13, 2014

Filed:

May. 23, 2013
Applicant:

United Microelectronics Corporation, Hsinchu, TW;

Inventors:

Chien-Hung Chen, Hsinchu, TW;

Tzu-Ping Chen, Hsinchu, TW;

Yu-Jen Chang, Taipei County, TW;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 29/82 (2006.01);
U.S. Cl.
CPC ...
Abstract

A non-volatile memory includes a substrate, a gate dielectric layer, a gate conductive layer, a nitride layer, a spacer, a first oxide layer, and a second oxide layer. The gate conductive layer, substrate and gate dielectric layer cooperatively constitute a symmetrical opening thereamong. The nitride layer has an L-shape and formed with a vertical part extending along a sidewall of the gate conductive layer and a horizontal part extending into the opening, wherein the vertical part and the horizontal part are formed as an integral structure and a height of the vertical part is below a top surface of the gate conductive layer. The spacer is disposed on the substrate and the nitride layer. The first oxide layer is disposed among the gate conductive layer, the nitride layer and the gate dielectric layer. The second oxide layer is disposed among the gate dielectric layer, the nitride layer and the substrate.


Find Patent Forward Citations

Chen, Chien-Hung. (2014). Non-volatile memory (U.S. Patent No. 8723249). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/8723249

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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