The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 06, 2014
Filed:
Feb. 14, 2013
Applicant:
Tokyo Electron Limited, Tokyo, JP;
Inventors:
Tadahiro Ohmi, Sendai, JP;
Tetsuya Goto, Sendai, JP;
Akinobu Teramoto, Sendai, JP;
Takaaki Matsuoka, Sendai, JP;
Assignees:
National University Corporation Tohoku University, Miyagi, JP;
Tokyo Electron Limited, Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/425 (2006.01); H01L 21/42 (2006.01);
U.S. Cl.
CPC ...
Abstract
A semiconductor device manufacturing method includes exciting plasma, applying RF power onto a target substrate to generate substrate bias and performing an ion implantation plural times by applying the RF power in the form of pulses.