The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 22, 2014
Filed:
Jan. 20, 2011
Tomohiko Akatsuka, Ichinomiya, JP;
Yasuto Ishida, Kakamigahara, JP;
Kanako Fukuda, Kakamigahara, JP;
Yoshihiro Kachi, Minokamo, JP;
Hisanori Tansho, Gifu, JP;
Tomohiko Akatsuka, Ichinomiya, JP;
Yasuto Ishida, Kakamigahara, JP;
Kanako Fukuda, Kakamigahara, JP;
Yoshihiro Kachi, Minokamo, JP;
Hisanori Tansho, Gifu, JP;
Fujimi Incorporated, Kiyosu-shi, Aichi, JP;
Abstract
A polishing composition of the present invention contains an oxidant, an anticorrosive, and a surfactant comprising a compound represented by Chemical Formula 1: One to three of Rto Rin Chemical Formula 1 are alkyl groups, alkynyl groups, alkenyl groups, aryl groups, or arylalkylene groups, one is a hydrogen atom or an alkyl group having 1 to 9 carbon atoms, and the remainder are hydrogen atoms. O—Ris oxyethylene, oxypropylene, or a random or block conjugate of oxyethylene and oxypropylene. n is an integer of 1 or more. X is an OSOgroup, an OPOgroup, or an OH group.