The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 15, 2014

Filed:

Feb. 17, 2010
Applicants:

Abraham Ravid, Cupertino, CA (US);

Todd Egan, Fremont, CA (US);

Karen Lingel, Union City, CA (US);

Mitchell Disanto, Georgetown, TX (US);

Hari Kishore Ambal, San Jose, CA (US);

Edward Budiarto, Fremont, CA (US);

Inventors:

Abraham Ravid, Cupertino, CA (US);

Todd Egan, Fremont, CA (US);

Karen Lingel, Union City, CA (US);

Mitchell DiSanto, Georgetown, TX (US);

Hari Kishore Ambal, San Jose, CA (US);

Edward Budiarto, Fremont, CA (US);

Assignee:

Applied Materials, Inc., Santa Clara, CA (US);

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H04N 7/18 (2006.01); G01B 11/00 (2006.01);
U.S. Cl.
CPC ...
H04N 7/18 (2013.01); Y10S 901/47 (2013.01);
Abstract

A metrology system has an elongate stationary camera pixel array facing a workpiece transit path of a robot with an field of view corresponding to a workpiece diameter and extending transverse to the transit path portion, and a stationary elongate light emitting array generally parallel to the pixel array. An image control processor causes the camera to capture successive image frames while the robot is moving the workpiece through the transit path.


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