The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 08, 2014
Filed:
Feb. 27, 2009
Souheil Benzerrouk, Lowell, MA (US);
Siddharth P. Nagarkatti, Acton, MA (US);
Andrew Cowe, Andover, MA (US);
Ali Shajii, Canton, MA (US);
Jesse E. Ambrosina, Topsfield, MA (US);
Ken Tran, North Chelmsford, MA (US);
Xing Chen, Lexington, MA (US);
Souheil Benzerrouk, Lowell, MA (US);
Siddharth P. Nagarkatti, Acton, MA (US);
Andrew Cowe, Andover, MA (US);
Ali Shajii, Canton, MA (US);
Jesse E. Ambrosina, Topsfield, MA (US);
Ken Tran, North Chelmsford, MA (US);
Xing Chen, Lexington, MA (US);
MKS Instruments Inc., Andover, MA (US);
Abstract
Described are methods and apparatuses, including computer program products, for igniting and/or sustaining a plasma in a reactive gas generator. Power is provided from an ignition power supply to a plasma ignition circuit. A pre-ignition signal of the plasma ignition circuit is measured. The power provided to the plasma ignition circuit is adjusted based on the measured pre-ignition signal and an adjustable pre-ignition control signal. The adjustable pre-ignition control signal is adjusted after a period of time has elapsed.