The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 08, 2014
Filed:
Feb. 19, 2010
Sander Baltussen, Breda, NL;
Guido DE Boer, Leerdam, NL;
Tijs Frans Teepen, Tilburg, NL;
Hugo Martijn Makkink, The Hague, NL;
Sander Baltussen, Breda, NL;
Guido De Boer, Leerdam, NL;
Tijs Frans Teepen, Tilburg, NL;
Hugo Martijn Makkink, The Hague, NL;
Mapper Lithography IP B.V., Delft, NL;
Abstract
A vacuum chamber comprising a plurality of wall panels enclosing an interior space, in which the wall panels are removably attached to form the chamber using a plurality of connection members for locating the wall panels in a predetermined arrangement. The vacuum chamber further comprises one or more sealing members provided at the edges of the wall panels. The wall panels are arranged so that a vacuum tight seal is formed at the edges of the wall panels as a result of forming a vacuum in the interior space.