The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 25, 2014
Filed:
Jun. 05, 2012
Maikel Adrianus Cornelis Schepers, Nuenen, NL;
Markus Franciscus Antonius Eurlings, Tilburg, NL;
Franciscus Johannes Joseph Janssen, Geldrop, NL;
Bernard Jacob Andries Stommen, Geldrop, NL;
Hrishikesh Patel, Eindoven, NL;
Hermanus Johannes Maria Kreuwel, Schijndel, NL;
Jacob Cohen, Eindhoven, NL;
Pepijn Wijnand Jozef Janssen, Eindhoven, NL;
Maarten Kees Jan Boon, Moergestel, NL;
Maikel Adrianus Cornelis Schepers, Nuenen, NL;
Markus Franciscus Antonius Eurlings, Tilburg, NL;
Franciscus Johannes Joseph Janssen, Geldrop, NL;
Bernard Jacob Andries Stommen, Geldrop, NL;
Hrishikesh Patel, Eindoven, NL;
Hermanus Johannes Maria Kreuwel, Schijndel, NL;
Jacob Cohen, Eindhoven, NL;
Pepijn Wijnand Jozef Janssen, Eindhoven, NL;
Maarten Kees Jan Boon, Moergestel, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
A radiation source includes a fuel supply configured to deliver fuel to a plasma emission location for vaporization by a laser beam to form a plasma, and a collector configured to collect EUV radiation emitted by the plasma and direct the EUV radiation towards an intermediate focus. The collector includes a diffraction grating configured to diffract infrared radiation emitted by the plasma. The radiation source includes a radiation conduit located in between the collector and the intermediate focus. The radiation conduit includes an entrance aperture connected by an inwardly tapering body to an exit aperture. The radiation conduit includes an inner portion and an outer portion, the inner portion being closer to the intermediate focus than the outer portion. The inner portion is configured to reflect incident diffracted infrared radiation towards the outer portion.