The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 18, 2014
Filed:
Sep. 05, 2012
Yuya Nakamori, Osaka, JP;
Tatsuya Ikenari, Osaka, JP;
Daisuke Maehara, Osaka, JP;
Masao Umehara, Osaka, JP;
Satoru Hamaishi, Osaka, JP;
Yuya Nakamori, Osaka, JP;
Tatsuya Ikenari, Osaka, JP;
Daisuke Maehara, Osaka, JP;
Masao Umehara, Osaka, JP;
Satoru Hamaishi, Osaka, JP;
Daihen Corporation, Osaka, JP;
Abstract
A high frequency power supply device includes a high frequency power generation unit configured to output a high frequency power to be supplied to a load and a control unit configured to detect a mean value of the high frequency power to control the high frequency power generation unit. A power change period detection unit detects a period of a level change of the high frequency power that is detected at an output side of the high frequency power generation unit due to a periodic change of a level of a high frequency power that is given to a load from another high frequency power supply device as a power change period T. A control period setting unit sets a control period Tto an appropriate value in accordance with the power change period Tdetected by the power change period detection unit.