The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 18, 2014
Filed:
Jan. 03, 2013
Semiconductor Manufacturing International Corp., Shanghai, CN;
Semiconductor Manufacturing International Corp., Shanghai, CN;
Abstract
A method is provided for fabricating a semiconductor structure. The method includes providing a semiconductor substrate, and forming a shallow trench isolation structure in the semiconductor substrate. The method also includes forming a plurality of parallel gate structures on the semiconductor substrate surrounded by the shallow trench isolation structure. Further, the method includes forming a plurality of first trenches in the semiconductor substrate at least one side of the gate structures proximity to the shallow trench isolation structure, and forming a first silicon germanium layer with a first germanium concentration in each of the first trenches. Further the method also includes forming a plurality second trenches in semiconductor substrate at least one side of the gate structures farther from the shallow trench isolation structure, and forming a second silicon germanium layer with a second germanium concentration greater than the first germanium concentration in each of the second trenches.