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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 8659741 B1

PDFFull Text
Date of Patent:
Feb. 25, 2014

Filed:

Nov. 15, 2010

Lithographic apparatus, removable member and device manufacturing method

Applicants:

Roelof Frederik DE Graaf, Veldhoven, NL;

Marcus Adrianus Van DE Kerkhof, Helmond, NL;

Martinus Hendrikus Antonius Leenders, Rhoon, NL;

Paulus Martinus Maria Liebregts, Veldhoven, NL;

Gerardus Martinus Antonius DE Rooij, Tilburg, NL;

Martijn Houben, 's-Hertogenbosch, NL;

Nina Vladimirovna Dziomkina, Eindhoven, NL;

Johanna Antoinette Maria Sondag-huethorst, Valkenswaard, NL;

Niek Elout DE Kruijf, Eindhoven, NL;

Vijay Kumar Badam, Eindhoven, NL;

Inventors:

Roelof Frederik De Graaf, Veldhoven, NL;

Marcus Adrianus Van De Kerkhof, Helmond, NL;

Martinus Hendrikus Antonius Leenders, Rhoon, NL;

Paulus Martinus Maria Liebregts, Veldhoven, NL;

Gerardus Martinus Antonius De Rooij, Tilburg, NL;

Martijn Houben, 's-Hertogenbosch, NL;

Nina Vladimirovna Dziomkina, Eindhoven, NL;

Johanna Antoinette Maria Sondag-Huethorst, Valkenswaard, NL;

Niek Elout De Kruijf, Eindhoven, NL;

Vijay Kumar Badam, Eindhoven, NL;

Assignee:

ASML Netherlands B.V., Veldhoven, NL;

Attorney:

Pillsbury Winthrop Shaw Pittman LLP

Primary Examiner:

Steven H Whitesell Gordon

Int. Cl.
CPC ...
G03B 27/52 (2006.01); B32B 7/12 (2006.01); G03F 7/20 (2006.01); C09J 7/02 (2006.01); C09J 7/04 (2006.01);
U.S. Cl.
CPC ...
G03F 7/7095 (2013.01); G03F 7/70341 (2013.01); G03F 7/70916 (2013.01); C09J 7/0217 (2013.01); C09J 7/04 (2013.01); B32B 2307/56 (2013.01); B32B 2307/71 (2013.01); B32B 2307/73 (2013.01); B32B 2307/546 (2013.01); B32B 2405/00 (2013.01);
Abstract

A sealing member is provided to prevent immersion liquid ingress to a gap between components. The sealing member has a plastic or polymer sealing portion that is adhered to the components forming the gap being sealed. The sealing member is constructed so as to reduce the force-coupling, in particular the time-related force-coupling, between the components being sealed.

Find Patent Forward Citations

De Graaf, Roelof. (2014). Lithographic apparatus, removable member and device manufacturing method (U.S. Patent No. 8659741). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/8659741

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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