The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 04, 2014
Filed:
Jul. 09, 2010
Scott A. Young, Soquel, CA (US);
Daniel L. Cavan, Woodside, CA (US);
Yale Zhang, Sunnyvale, CA (US);
Aviv Balan, Mountain View, CA (US);
Scott A. Young, Soquel, CA (US);
Daniel L. Cavan, Woodside, CA (US);
Yale Zhang, Sunnyvale, CA (US);
Aviv Balan, Mountain View, CA (US);
KLA-Tencor Corporation, Milpitas, CA (US);
Abstract
A system for inspecting a depth relative to a layer using a sensor with a fixed focal plane. A focus sensor senses the surface of the substrate and outputs focus data. In setup mode the controller scans a first portion of the substrate, receives the focus data and XY data, and stores correlated XYZ data for the substrate. In inspection mode the controller scans a second portion of the substrate, receives the focus data and XY data, and subtracts the stored Z data from the focus data to produce virtual data. The controller feeds the virtual data plus an offset to the motor for moving the substrate up and down during the inspection, thereby holding the focal plane at a desired Z distance.