The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 8638438 B1

PDF
Full Text
Expired
Date of Patent:
Jan. 28, 2014

Filed:

Aug. 17, 2011
Applicants:

Christopher P. Ausschnitt, Naples, FL (US);

Nelson Felix, Briarcliff Manor, NY (US);

Inventors:

Christopher P. Ausschnitt, Naples, FL (US);

Nelson Felix, Briarcliff Manor, NY (US);

Attorneys:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01B 11/00 (2006.01);
U.S. Cl.
CPC ...
Abstract

An alignment feature disposed on a substrate, the alignment feature including a first lithographic pattern having a first aggregate geometric center point defined by a first sub-pattern comprising alignment marks having a first sub-pattern geometric center point arranged a distance (d) in a first direction from the first aggregate geometric center point, and a second sub-pattern comprising alignment marks having a second sub-pattern geometric center point arranged the distance din a reciprocal direction of the first direction from the first aggregate geometric center point.


Find Patent Forward Citations

Ausschnitt, Christopher. (2014). Self-calibrated alignment and overlay target and measurement (U.S. Patent No. 8638438). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/8638438

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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