The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 28, 2014
Filed:
Apr. 12, 2011
Danny Maria Hubertus Philips, Son en Breugel, NL;
Daniel Jozef Maria Direcks, Simpelveld, NL;
Clemens Johannes Gerardus Van Den Dungen, Someren, NL;
Maikel Adrianus Cornelis Schepers, Nuenen, NL;
Paul Petrus Joannes Berkvens, Veldhoven, NL;
Marcus Johannes Van Der Zanden, Boekel, NL;
Pieter Mulder, Duizel, NL;
Danny Maria Hubertus Philips, Son en Breugel, NL;
Daniel Jozef Maria Direcks, Simpelveld, NL;
Clemens Johannes Gerardus Van Den Dungen, Someren, NL;
Maikel Adrianus Cornelis Schepers, Nuenen, NL;
Paul Petrus Joannes Berkvens, Veldhoven, NL;
Marcus Johannes Van Der Zanden, Boekel, NL;
Pieter Mulder, Duizel, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
A fluid handling structure configured to supply immersion liquid to a space defined between a projection system and a facing surface facing the fluid handling structure is disclosed. An undersurface of the fluid handling structure has a supply opening configured to supply fluid toward the facing surface, a plurality of extraction openings configured to remove fluid from between the fluid handling structure and the facing surface, and a protrusion between the supply opening and the extraction openings.