The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 28, 2014
Filed:
Oct. 07, 2010
Applicants:
Jun Chen, Fremont, CA (US);
Guomin Mao, San Jose, CA (US);
Tom Zhong, Saratoga, CA (US);
Wei Cao, San Jose, CA (US);
Yee-chung Fu, Fremont, CA (US);
Chyu-jiuh Torng, Pleasanton, CA (US);
Inventors:
Jun Chen, Fremont, CA (US);
Guomin Mao, San Jose, CA (US);
Tom Zhong, Saratoga, CA (US);
Wei Cao, San Jose, CA (US);
Yee-Chung Fu, Fremont, CA (US);
Chyu-Jiuh Torng, Pleasanton, CA (US);
Assignees:
MagIC Technologies, Inc., Milpitas, CA (US);
Advanced Numicro Systems, Inc., San Jose, CA (US);
Primary Examiner:
Int. Cl.
CPC ...
B81C 1/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
Two methods of fabricating a MEMS scanning mirror having a tunable resonance frequency are described. The resonance frequency of the mirror is set to a particular value by mass removal from the backside of the mirror during fabrication.