The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 28, 2014
Filed:
Aug. 07, 2009
Hisashi Masumura, Nishishirakawa, JP;
Hiromasa Hashimoto, Nishishirakawa, JP;
Kouji Morita, Nishishirakawa, JP;
Hiromi Kishida, Nagano, JP;
Satoru Arakawa, Nagano, JP;
Hisashi Masumura, Nishishirakawa, JP;
Hiromasa Hashimoto, Nishishirakawa, JP;
Kouji Morita, Nishishirakawa, JP;
Hiromi Kishida, Nagano, JP;
Satoru Arakawa, Nagano, JP;
Shin-Etsu Handotai Co., Ltd., Tokyo, JP;
Fujikoshi Machinery Corp., Nagano, JP;
Abstract
A polishing head for holding a workpiece when a surface of the workpiece is polished and a polishing apparatus provided with the polishing head, and more particularly a polishing head for holding the workpiece on a rubber film and a polishing apparatus provided with the polishing head. The polishing head and the polishing apparatus provided with the polishing head that can adjust the polishing profile on the basis of the shape of the workpiece before polishing and can stably obtain good flatness.