The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 21, 2014

Filed:

Dec. 22, 2010
Applicants:

Michael G. Haverty, Mountain View, CA (US);

Sadasivan Shankar, Cupertino, CA (US);

Inventors:

Michael G. Haverty, Mountain View, CA (US);

Sadasivan Shankar, Cupertino, CA (US);

Assignee:

Intel Corporation, Santa Clara, CA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 29/792 (2006.01); H01L 21/336 (2006.01);
U.S. Cl.
CPC ...
Abstract

An apparatus comprises a substrate, a phonon-decoupling layer formed on the substrate, a gate dielectric layer formed on the phonon-decoupling layer, a gate electrode formed on the gate dielectric layer, a pair of spacers formed on opposite sides of the gate electrode, a source region formed in the substrate subjacent to the phonon-decoupling layer, and a drain region formed in the substrate subjacent to the phonon-decoupling layer. The phonon-decoupling layer prevents the formation of a silicon dioxide interfacial layer and reduces coupling between high-k phonons and the field in the substrate.


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