The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 21, 2014
Filed:
Jul. 23, 2009
Applicants:
Yoshikazu Moriyama, Shizuoka, JP;
Kunihiko Suzuki, Shizuoka, JP;
Hironobu Hirata, Shizuoka, JP;
Inventors:
Assignee:
NuFlare Technology, Inc., Shizuoka, JP;
Primary Examiner:
Int. Cl.
CPC ...
C23C 16/455 (2006.01); C23F 1/00 (2006.01); H01L 21/306 (2006.01); C23C 16/06 (2006.01); C23C 16/22 (2006.01);
U.S. Cl.
CPC ...
Abstract
In a coating apparatus, a distributor plateis disposed upstream of a silicon waferrelative to the direction of flow of reactive gas. The distributor platehas therein first through-holesand second through-holesarranged so as not to meet the first through-holes. The reactive gas passes through the first through-holesand flows down toward the silicon wafer. Further, a cooling gas passes through the second through-holes