The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 14, 2014
Filed:
Feb. 11, 2004
Toshihiro Hayami, Nirasaki, JP;
Masahide Iwasaki, Nirasaki, JP;
Junichi Takahira, Niiza, JP;
Kazuyoshi Watanabe, Niiza, JP;
Shinichi Komatsu, Hanno, JP;
Yuichi Sasaki, Hanno, JP;
Toshihiro Hayami, Nirasaki, JP;
Masahide Iwasaki, Nirasaki, JP;
Junichi Takahira, Niiza, JP;
Kazuyoshi Watanabe, Niiza, JP;
Shinichi Komatsu, Hanno, JP;
Yuichi Sasaki, Hanno, JP;
Tokyo Electron Limited, Tokyo-To, JP;
Abstract
A plasma processing unit of the present invention includes a processing container whose inner pressure can be reduced, a first electrode arranged in the processing container, a process gas supplying unit that supplies a process gas into the processing container, a high-frequency electric power source that outputs high-frequency electric power having a frequency in a VHF band, a matching unit electrically connected to the high-frequency electric power source and the first electrode for impedance matching, and a transmission line that transmits the high-frequency electric power from the high-frequency electric power source to the matching unit. A substrate to be processed is adapted to be arranged in the processing container. The high-frequency electric power transmitted to the first electrode is adapted to generate plasma in such a manner that the substrate to be processed can undergo a plasma process by means of the plasma. The transmission line has a length shorter than a length wherein a resonance state of a third harmonic wave of the high-frequency electric power may be generated.