The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 07, 2014
Filed:
Oct. 28, 2011
Matthew Barrett, Narangba, AU;
Michael D. Smith, New Farm, AU;
Michal Geryk, Brno, CZ;
Paul Scagnetti, New Farm, AU;
Richard Tovey, Acacia Ridge, AU;
Matthew Barrett, Narangba, AU;
Michael D. Smith, New Farm, AU;
Michal Geryk, Brno, CZ;
Paul Scagnetti, New Farm, AU;
Richard Tovey, Acacia Ridge, AU;
FEI Company, Hillsboro, OR (US);
Abstract
A sample holder assembly includes a sample tray, a base plate, a stage mount, and a calibration standard mounted onto the stage mount. Three mating structures on the bottom of the base plate mate with corresponding structures on a stage mount that is attached to the sample stage of the SEM. An optional contacting conductor provides electrical contact between the stage mount and the base plate so that charge generated on the sample by the electron beam can leave the sample through the sample conductive layer to the sample tray, to the base plate, to the stage mount, and through the grounded stage.