The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 07, 2014
Filed:
Dec. 18, 2009
Joy Cheng, San Jose, CA (US);
Matthew E. Colburn, Schenectady, NY (US);
Stefan Harrer, New York City, NY (US);
William D. Hinsberg, Fremont, CA (US);
Steven J. Holmes, Guilderland, NY (US);
Ho-cheol Kim, San Jose, CA (US);
Daniel Paul Sanders, San Jose, CA (US);
Joy Cheng, San Jose, CA (US);
Matthew E. Colburn, Schenectady, NY (US);
Stefan Harrer, New York City, NY (US);
William D. Hinsberg, Fremont, CA (US);
Steven J. Holmes, Guilderland, NY (US);
Ho-Cheol Kim, San Jose, CA (US);
Daniel Paul Sanders, San Jose, CA (US);
International Business Machines Corporation, Armonk, NY (US);
Abstract
A layered structure comprising a self-assembled material is formed by a method that includes forming a photochemically, thermally and/or chemically treated patterned photoresist layer disposed on a first surface of a substrate. The treated patterned photoresist layer comprises a non-crosslinked treated photoresist. An orientation control material is cast on the treated patterned photoresist layer, forming a layer containing orientation control material bound to a second surface of the substrate. The treated photoresist and, optionally, any non-bound orientation control material are removed by a development process, resulting in a pre-pattern for self-assembly. A material capable of self-assembly is cast on the pre-pattern. The casted material is allowed to self-assemble with optional heating and/or annealing to produce the layered structure.