The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 24, 2013
Filed:
Feb. 07, 2012
Tomotaka Tsuchimura, Haibara-gun, JP;
Takeshi Inasaki, Haibara-gun, JP;
Hiroo Takizawa, Haibara-gun, JP;
Tomotaka Tsuchimura, Haibara-gun, JP;
Takeshi Inasaki, Haibara-gun, JP;
Hiroo Takizawa, Haibara-gun, JP;
FUJIFILM Corporation, Tokyo, JP;
Abstract
A resist film formed by using a chemical amplification type resist composition containing (A) a high molecular compound having a structure wherein a hydrogen atom of a phenolic hydroxyl group is substituted by a group represented by the following general formula (I), (B) a compound generating an acid upon irradiation with actinic rays or radiation, and an organic solvent, and the film thickness is 10 to 200 nm. wherein, Rrepresents a hydrocarbon group, Rrepresents a hydrogen atom or a hydrocarbon group, and Ar represents an aryl group. Rmay also bind to Ar to form a ring which may also contain a heteroatom. * represents a binding position with an oxygen atom of the phenolic hydroxyl group.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile