The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 17, 2013
Filed:
Apr. 20, 2006
Daisuke Hayashi, Nirasaki, JP;
Akira Muramatsu, Shinjuku-ku, JP;
Daisuke Hayashi, Nirasaki, JP;
Akira Muramatsu, Shinjuku-ku, JP;
Tokyo Electron Limited, Tokyo, JP;
Nippon Valqua Industries, Ltd., Tokyo, JP;
Abstract
A sealing part that is inexpensive and enable excellent durability to be secured without the need for a predetermined sealing space as would be required for a double sealing structure. A sealing part seals an inside of a reduced pressure vessel from an outside, in which a high-elasticity polymeric material-eroding eroding substance is present and which is comprised of a substrate processing apparatus carrying out predetermined processing on a substrate housed in the reduced pressure vessel. The sealing part has a radical sealing member and a vacuum sealing member. The radical sealing member is disposed on an inside side of the reduced pressure vessel and is resistant to the eroding substance. The vacuum sealing member is made of the high-elasticity polymeric material and is disposed on an outside side of the reduced pressure vessel. At least one refuge space is formed through at least part of the radical sealing member and at least part of the vacuum sealing member being separated from one another. The radical sealing member and the vacuum sealing member are fitted together.