The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 17, 2013
Filed:
Dec. 06, 2010
Hisaki Ishida, Nirasaki, JP;
Masato Hayashi, Nirasaki, JP;
Koudai Higashi, Nirasaki, JP;
Tokyo Electron Limited, Tokyo, JP;
Abstract
Disclosed is a temperature measuring apparatus which is provided with: a substrate (); a temperature sensor () disposed on one surface of the substrate (); and a wire () disposed to electrically connect together a circuit, which detects a temperature using the temperature sensor (), and the temperature sensor (). In said surface of the substrate (), a recessed section () having a heat capacity smaller than that of the material of the substrate () is formed on the periphery of the temperature sensor (). The recessed section () is formed at a predetermined interval from the temperature sensor () such that the recessed section surrounds the temperature sensor () and has predetermined width and depth. Preferably, the low heat capacity zone is the recessed section (), i.e., the groove having a recessed cross-section.