The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 03, 2013
Filed:
Dec. 12, 2008
Danny Brown, Brentwood, CA (US);
Allan Ronne, Santa Clara, CA (US);
Arthur Sato, San Jose, CA (US);
John Daugherty, Fremont, CA (US);
Leonard Sharpless, Fremont, CA (US);
Danny Brown, Brentwood, CA (US);
Allan Ronne, Santa Clara, CA (US);
Arthur Sato, San Jose, CA (US);
John Daugherty, Fremont, CA (US);
Leonard Sharpless, Fremont, CA (US);
Lam Research Corporation, Fremont, CA (US);
Abstract
A linear actuator comprised of an actuator body having a first portion and a second portion, each arranged along a longitudinal axis of the actuator body. A vacuum bellows is concentrically located in the first portion and is configured to seal a vacuum environment from the second portion. A linear motion shaft is concentrically located substantially within the actuator body and is configured to move in a linear direction along the longitudinal axis. An electrically conductive portion of the shaft is concentrically located substantially within the vacuum bellows and electrically insulated therefrom and is configured to receive and conduct a signal. A lift force generating portion of the shaft is concentrically located substantially within the second portion. An electrical contact pad is electrically coupled to the conductive portion of the shaft and is configured to couple the signal to another surface upon activation of the shaft.