The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 26, 2013
Filed:
Mar. 28, 2006
Masayoshi Yokoo, Yamagata, JP;
Isao Tanikawa, Yamagata, JP;
Norikazu Kainuma, Yamagata, JP;
Yoshinobu Takano, Yamagata, JP;
Masayoshi Yokoo, Yamagata, JP;
Isao Tanikawa, Yamagata, JP;
Norikazu Kainuma, Yamagata, JP;
Yoshinobu Takano, Yamagata, JP;
Tohoku Seiki Industries, Ltd., Yamagata, JP;
Abstract
A sputtering system for depositing a thin film on the surface of a disc substrate in which high precision positioning of an inner mask and an outer mask is facilitated. The sputtering system has a mask member placed on the surface of the substrate mounted on a substrate holder to cover a partial region on the surface of the substrate. A thin film is deposited by sputtering in a region on the surface of the substrate not covered by the mask member. A section for carrying in and carrying out the substrate has mechanically holds and releases the substrate holder mounting the substrate, and mechanically holds and releases the mask member.