The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 19, 2013

Filed:

Jul. 25, 2012
Applicants:

Hiroki Inoue, Itami, JP;

Keiji Ishibashi, Itami, JP;

Shinsuke Fujiwara, Itami, JP;

Inventors:

Hiroki Inoue, Itami, JP;

Keiji Ishibashi, Itami, JP;

Shinsuke Fujiwara, Itami, JP;

Assignee:

Sumitomo Electric Industries, Ltd., Osaka-shi, Osaka, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 29/38 (2006.01);
U.S. Cl.
CPC ...
Abstract

Silicon carbide single crystal is prepared. Using the silicon carbide single crystal as a material, a silicon carbide substrate having a first face and a second face located at a side opposite to the first face is formed. In the formation of the silicon carbide substrate, a first processed damage layer and a second processed damage layer are formed at the first face and second face, respectively. The first face is polished such that at least a portion of the first processed damage layer is removed and the surface roughness of the first face becomes less than or equal to 5 nm. At least a portion of the second processed damage layer is removed while maintaining the surface roughness of the second plane greater than or equal to 10 nm.


Find Patent Forward Citations

Inoue, Hiroki. (2013). Silicon carbide substrate manufacturing method and silicon carbide substrate (U.S. Patent No. 8586998). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/8586998

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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