The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 19, 2013
Filed:
Dec. 06, 2010
Isao Nagaoki, Hitachinaka, JP;
Toshiaki Tanigaki, Hitachinaka, JP;
Yoshihiro Ohtsu, Mito, JP;
Hitachi High-Technologies Corporation, Tokyo, JP;
Abstract
A transmission electron microscope includes an electron gunthat irradiates a samplewith an electron beam; an electron detectorthat detects electrons that are passed through the sampleand scattered; a first detection-side annular aperturethat is located between the electron detectorand the sampleand has a ring-shaped slit that limits inner and outer diameters of a transmission region of electrons scattered from the sample; and a second detection-side annular aperturethat is located between the first detection-side annular apertureand the electron detectorand has a ring-shaped slit that limits inner and outer diameters of a transmission region of scattered electrons that have passed through the first detection-side annular aperture. It is, therefore, possible to detect electrons scattered at high scattering angles without a limitation caused by a spherical aberration of an electron lens and improve a depth resolution.